公开(公告)号：US20160126068A1

公开(公告)日：2016-05-05

申请号：US14827347

申请日：2015-08-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dong-soo LEE ,  Sung-ho JANG ,  Byeong-hee KIM ,  Doug-yong SUNG ,  Dong-ok SHIN

IPC: H01J37/32 ,  H01J37/244 ,  G01J1/44

CPC classification number: H01J37/32146 ,  G01J1/44 ,  G01J2001/4238 ,  G01J2001/4453 ,  H01J37/32091 ,  H01J37/32935 ,  H01J37/32972

Abstract: A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.

Abstract translation: 用于脉冲等离子体的诊断系统包括用于接收产生脉冲等离子体的光的光发射传感器（OES），根据脉冲信号产生的脉冲等离子体，使电信号与脉冲信号同步的数字化仪，和分析仪 分析同步电信号。