发明申请
- 专利标题： Apparatus and System for Generating Extreme Ultraviolet Light and Method of Using the Same
- 专利标题（中）： 用于产生极紫外光的装置和系统及其使用方法
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申请号： US14803920申请日： 2015-07-20
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公开(公告)号： US20160143122A1公开(公告)日： 2016-05-19
- 发明人: Jin-Seok Heo , Jin-Hong Park
- 申请人： Jin-Seok Heo , Jin-Hong Park
- 优先权： KR10-2014-0161941 20141119
- 主分类号： H05G2/00
- IPC分类号： H05G2/00 ; G03F7/20 ; B05B12/12 ; G21K1/06
摘要：
Provided is an apparatus for generating extreme ultraviolet light. The apparatus includes a collector mirror unit, a gas supply unit configured to supply a processing gas to the collector mirror unit, a gas supply nozzle arranged in at least one area of the collector mirror unit and configured to supply the processing gas to a surface of the collector mirror unit, and a controller configured to adjust a shape of a spray hole of the gas supply nozzle. The shape of the spray hole may be changed according to a control operation of the controller.