Invention Application
US20160143589A1 BIOLOGICAL MEASUREMENT DEVICE AND BIOLOGICAL MEASUREMENT METHOD 审中-公开
生物测量装置和生物测量方法

BIOLOGICAL MEASUREMENT DEVICE AND BIOLOGICAL MEASUREMENT METHOD
Abstract:
A biological measurement device includes a phase modulation type interferometer, a first stage, a light transmitting plate, and a second stage. The first stage is able to retain a target which is a biological body. The light transmitting plate is disposed between the first stage and the interferometer in a direction of an optical axis of measurement light of the interferometer. The second stage supports the light transmitting plate. The first stage is configured to expand by a pressure of a gaseous body in the direction of the optical axis of the measurement light of the interferometer and to press the target against the light transmitting plate.
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