Abstract:
When light adjusted at equal frequency intervals by optical comb generation filter 205 is incident and emitted from measurement head 207 to measurement target W, the light adjusted at equal frequency intervals by optical comb generation filter 205 is divided into measurement light and reference light by light division unit 208, and interference light in which reflected light of the measurement light from measurement target W and the reference light are multiplexed is detected by interference light detection unit 210.
Abstract:
A protective member protects an objective lens. The protective member includes an insertion opening through which an objective lens is configured to be inserted and a main body configured to cover the inserted objective lens. The main body includes a side wall portion connected to the insertion opening and a bottom portion connected to the side wall portion as well as facing the insertion opening, and covers the inserted objective lens with the side wall portion and the bottom portion. The protective member further includes a liquid disposed inside the main body, a sealing film body for sealing the insertion opening and a window arranged in the bottom portion of the main body, through which light transmits. The protective member can simplify the work.
Abstract:
The present disclosure is a sheet producing device for producing a multi-layer sheet by applying a coating material to a sheet material. The sheet producing device includes a radiation light source that emits radiation light, a division part that divides the radiation light into measurement light to be incident on the multi-layer sheet and reference light with which a reference surface is to be irradiated, and an optical member that emits the measurement light onto the multi-layer sheet and receives the measurement light reflected by the multi-layer sheet. An interference detector that detects interference light between the measurement light reflected by the multi-layer sheet and the reference light reflected by the reference surface, and a thickness calculator that calculates a thickness of the sheet material and a thickness of the coating material of the multi-layer sheet based on the detected interference light are further included. As a result, the tact time from the production of the multi-layer sheet to the calculation of the thickness can be shortened.
Abstract:
A biological measurement device includes a phase modulation type interferometer, a first stage, a light transmitting plate, and a second stage. The first stage is able to retain a target which is a biological body. The light transmitting plate is disposed between the first stage and the interferometer in a direction of an optical axis of measurement light of the interferometer. The second stage supports the light transmitting plate. The first stage is configured to expand by a pressure of a gaseous body in the direction of the optical axis of the measurement light of the interferometer and to press the target against the light transmitting plate.
Abstract:
A measuring device includes: a light source; an interference optical system that separates light into reference light and irradiation light, generates interference light by causing interference between the reference light and reflected light generated by reflection of the irradiation light on an object; a photodetector that receives the interference light and outputs a signal corresponding to an intensity of the interference light; and a processing circuit that controls the light source and generates and outputs data on a distance and/or velocity of the object based on the signal outputted from the photodetector, in which the processing circuit causes the light source to emit light having a frequency that changes with time within a first frequency range in a first mode, and causes the light source to emit light having a frequency that changes with time within a second frequency range different from the first frequency range in the second mode.
Abstract:
In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.