OPTICAL INTERFERENCE MEASUREMENT DEVICE

    公开(公告)号:US20250035427A1

    公开(公告)日:2025-01-30

    申请号:US18916775

    申请日:2024-10-16

    Abstract: When light adjusted at equal frequency intervals by optical comb generation filter 205 is incident and emitted from measurement head 207 to measurement target W, the light adjusted at equal frequency intervals by optical comb generation filter 205 is divided into measurement light and reference light by light division unit 208, and interference light in which reflected light of the measurement light from measurement target W and the reference light are multiplexed is detected by interference light detection unit 210.

    PROTECTIVE MEMBER
    2.
    发明申请
    PROTECTIVE MEMBER 有权
    保护会员

    公开(公告)号:US20160259162A1

    公开(公告)日:2016-09-08

    申请号:US14889136

    申请日:2015-04-07

    Abstract: A protective member protects an objective lens. The protective member includes an insertion opening through which an objective lens is configured to be inserted and a main body configured to cover the inserted objective lens. The main body includes a side wall portion connected to the insertion opening and a bottom portion connected to the side wall portion as well as facing the insertion opening, and covers the inserted objective lens with the side wall portion and the bottom portion. The protective member further includes a liquid disposed inside the main body, a sealing film body for sealing the insertion opening and a window arranged in the bottom portion of the main body, through which light transmits. The protective member can simplify the work.

    Abstract translation: 保护构件保护物镜。 保护构件包括插入孔,物镜构成为插入孔,主体构造成覆盖插入的物镜。 主体包括连接到插入口的侧壁部分和连接到侧壁部分的底部以及面向插入开口,并且用侧壁部分和底部部分覆盖插入的物镜。 保护构件还包括设置在主体内部的液体,用于密封插入口的密封膜体和布置在主体的底部中的窗口,光通过该窗口透射。 保护构件可以简化工作。

    SHEET PRODUCING DEVICE AND SHEET PRODUCING METHOD

    公开(公告)号:US20210372774A1

    公开(公告)日:2021-12-02

    申请号:US17314085

    申请日:2021-05-07

    Abstract: The present disclosure is a sheet producing device for producing a multi-layer sheet by applying a coating material to a sheet material. The sheet producing device includes a radiation light source that emits radiation light, a division part that divides the radiation light into measurement light to be incident on the multi-layer sheet and reference light with which a reference surface is to be irradiated, and an optical member that emits the measurement light onto the multi-layer sheet and receives the measurement light reflected by the multi-layer sheet. An interference detector that detects interference light between the measurement light reflected by the multi-layer sheet and the reference light reflected by the reference surface, and a thickness calculator that calculates a thickness of the sheet material and a thickness of the coating material of the multi-layer sheet based on the detected interference light are further included. As a result, the tact time from the production of the multi-layer sheet to the calculation of the thickness can be shortened.

    MEASURING DEVICE AND NON-TRANSITORY COMPUTER-READABLE MEDIUM

    公开(公告)号:US20240004042A1

    公开(公告)日:2024-01-04

    申请号:US18468720

    申请日:2023-09-17

    CPC classification number: G01S7/4911 G01S17/34 G01S7/4917 G01S17/931

    Abstract: A measuring device includes: a light source; an interference optical system that separates light into reference light and irradiation light, generates interference light by causing interference between the reference light and reflected light generated by reflection of the irradiation light on an object; a photodetector that receives the interference light and outputs a signal corresponding to an intensity of the interference light; and a processing circuit that controls the light source and generates and outputs data on a distance and/or velocity of the object based on the signal outputted from the photodetector, in which the processing circuit causes the light source to emit light having a frequency that changes with time within a first frequency range in a first mode, and causes the light source to emit light having a frequency that changes with time within a second frequency range different from the first frequency range in the second mode.

    INNER LAYER MEASUREMENT METHOD AND INNER LAYER MEASUREMENT DEVICE
    6.
    发明申请
    INNER LAYER MEASUREMENT METHOD AND INNER LAYER MEASUREMENT DEVICE 有权
    内层测量方法和内层测量装置

    公开(公告)号:US20160097921A1

    公开(公告)日:2016-04-07

    申请号:US14859208

    申请日:2015-09-18

    Abstract: In an inner layer measurement method, first irradiation light and second irradiation light having a peak wavelength longer than that of the first irradiation light are formed by changing at least one of a position where light emitted from a lamp is transmitted through a short pass filter and a position where light emitted from a lamp is transmitted through a long pass filter. Then, a first XY sectional surface of a semitransparent body is measured by irradiating the first XY sectional surface with the first irradiation light. A second XY sectional surface positioned on a layer deeper than the first XY sectional surface is measured by irradiating the second XY sectional surface with the second irradiation light. Each of the short pass filter and the long pass filter can transmit the light and has properties of changing a cutoff wavelength according to the position where the light is transmitted.

    Abstract translation: 在内层测定方法中,通过改变通过短路滤波器透射从灯发出的光的位置中的至少一个,形成具有比第一照射光长的峰值波长的第一照射光和第二照射光, 从灯发出的光透过长通滤光器的位置。 然后,通过用第一照射光照射第一XY截面来测量半透明体的第一XY截面。 通过用第二照射光照射第二XY截面来测量位于比第一XY截面更深的层的第二XY截面。 短路滤波器和长距离滤波器中的每一个可以透射光,并且具有根据发射光的位置改变截止波长的性质。

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