Invention Application
- Patent Title: THIN-FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME FIELD
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US14944711Application Date: 2015-11-18
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Publication No.: US20160149047A1Publication Date: 2016-05-26
- Inventor: Hajime Watakabe , Arichika Ishida , Takashi Okada , Masayoshi Fuchi , Akihiro Hanada
- Applicant: Japan Display Inc.
- Applicant Address: JP Minato-ku
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Minato-ku
- Priority: JP2014-237936 20141125
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L23/00 ; H01L21/385 ; H01L29/66

Abstract:
According to one embodiment, a thin-film transistor and a method of manufacturing the same achieve size reduction of the thin-film transistor while using an oxide semiconductor layer. The oxide semiconductor layer includes a channel region, a source region, and a drain region. A gate electrode is arranged at a position spaced from the channel region of the oxide semiconductor layer so as to face the channel region. A source electrode is electrically connected to the source region of the oxide semiconductor layer. A drain electrode is electrically connected to the drain region of the oxide semiconductor layer. An undercoat layer adjoins the source region and the drain region of the oxide semiconductor layer. A hydrogen blocking layer has a hydrogen concentration lower than that in the undercoat layer and separates the undercoat layer and the channel region of the oxide semiconductor layer.
Public/Granted literature
- US09911859B2 Thin-film transistor and method of manufacturing the same field Public/Granted day:2018-03-06
Information query
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