Invention Application
US20160154311A1 DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING APPARATUS 审中-公开
开发方法,计算机可读存储介质和开发设备

  • Patent Title: DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING APPARATUS
  • Patent Title (中): 开发方法,计算机可读存储介质和开发设备
  • Application No.: US14953109
    Application Date: 2015-11-27
  • Publication No.: US20160154311A1
    Publication Date: 2016-06-02
  • Inventor: Koshi MUTAHideharu KYODAMinoru KUBOTA
  • Applicant: TOKYO ELECTRON LIMITED
  • Priority: JP2014-243139 20141201; JP2015-212830 20151029
  • Main IPC: G03F7/30
  • IPC: G03F7/30 G03F7/32
DEVELOPING METHOD, COMPUTER-READABLE STORAGE MEDIUM AND DEVELOPING APPARATUS
Abstract:
A developing method includes: forming a liquid pool of a diluted developing solution diluted with pure water in a central portion of a substrate; forming a liquid film of the diluted developing solution on a surface of the substrate by accelerating rotation of the substrate to diffuse the liquid pool of the diluted developing solution on the entire surface of the substrate; and then supplying a developing solution onto the substrate. Supplying a developing solution includes: supplying the developing solution from a developing solution supply nozzle having a liquid contact surface while securing a gap having a predetermined size between the developing solution supply nozzle and the substrate; and moving the developing solution supply nozzle in a radial direction passing through a center of the substrate while forming a liquid pool of the developing solution between the substrate and the liquid contact surface of the developing solution supply nozzle.
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