Invention Application
- Patent Title: METHOD FOR PRODUCING MOLD FOR MINUTE PATTERN TRANSFER, METHOD FOR PRODUCING DIFFRACTION GRATING USING THE SAME, AND METHOD FOR PRODUCING ORGANIC EL ELEMENT INCLUDING THE DIFFRACTION GRATING
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Application No.: US15041764Application Date: 2016-02-11
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Publication No.: US20160161647A1Publication Date: 2016-06-09
- Inventor: Satoshi MASUYAMA , Madoka TAKAHASHI , Suzushi NISHIMURA , Maki FUKUDA , Takashi SEKI
- Applicant: JX NIPPON OIL & ENERGY CORPORATION , TOKYO INSTITUTE OF TECHNOLOGY
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: JX NIPPON OIL & ENERGY CORPORATION,TOKYO INSTITUTE OF TECHNOLOGY
- Current Assignee: JX NIPPON OIL & ENERGY CORPORATION,TOKYO INSTITUTE OF TECHNOLOGY
- Current Assignee Address: JP Tokyo JP Tokyo
- Priority: JP2011-006487 20110114
- Main IPC: G02B5/18
- IPC: G02B5/18 ; B29C43/36 ; B29C35/08 ; H01L51/56 ; C25D1/10 ; G02B27/42 ; H01L51/52 ; B29C43/02 ; B29D11/00

Abstract:
A method for producing a mold includes: applying a block copolymer solution made of first and second polymers on a base member; performing a first annealing process at a temperature higher than Tg of the block copolymer after drying the coating film; forming a concavity and convexity structure on the base member by removing the second polymer by an etching process; performing a second annealing process of the concavity and convexity structure at a temperature higher than Tg of the first polymer; forming a seed layer on the structure; laminating or stacking a metal layer on the seed layer by an electroforming; and peeling off the metal layer from the base member. The second annealing process enables satisfactory transfer of a concavity and convexity structure on the base member onto the metal layer.
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