Invention Application
- Patent Title: PELLICLE WITH AEROGEL SUPPORT FRAME
- Patent Title (中): 带气球支撑框架的油门
-
Application No.: US14560688Application Date: 2014-12-04
-
Publication No.: US20160161857A1Publication Date: 2016-06-09
- Inventor: Harry J. Levinson , Obert R. Wood, II
- Applicant: GLOBALFOUNDRIES Inc.
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/22

Abstract:
Disclosed herein are various pellicles for use during extreme ultraviolet (EUV) photolithography processes. An EUV radiation device disclosed herein includes a reticle, a substrate support stage, a pellicle positioned between the reticle and the substrate support stage, wherein the pellicle includes an aerogel grid and a membrane formed on the aerogel grid, and a radiation source that is adapted to generate radiation at a wavelength of about 20 nm or less that is to be directed through the pellicle toward the reticle.
Public/Granted literature
- US09547232B2 Pellicle with aerogel support frame Public/Granted day:2017-01-17
Information query
IPC分类: