Invention Application
- Patent Title: High Breakdown Voltage Microelectronic Device Isolation Structure with Improved Reliability
- Patent Title (中): 高击穿电压微电子器件隔离结构提高可靠性
-
Application No.: US15045449Application Date: 2016-02-17
-
Publication No.: US20160163785A1Publication Date: 2016-06-09
- Inventor: Jeffrey Alan West , Thomas D. Bonifield , Byron Lovell Williams
- Applicant: Texas Instruments Incorporated
- Main IPC: H01L49/02
- IPC: H01L49/02

Abstract:
A microelectronic device contains a high voltage component having a high voltage node and a low voltage node. The high voltage node is isolated from the low voltage node by a main dielectric between the high voltage node and low voltage elements at a surface of the substrate of the microelectronic device. A lower-bandgap dielectric layer is disposed between the high voltage node and the main dielectric. The lower-bandgap dielectric layer contains at least one sub-layer with a bandgap energy less than a bandgap energy of the main dielectric. The lower-bandgap dielectric layer extends beyond the high voltage node continuously around the high voltage node. The lower-bandgap dielectric layer has an isolation break surrounding the high voltage node at a distance of at least twice the thickness of the lower-bandgap dielectric layer from the high voltage node.
Public/Granted literature
- US09768245B2 High breakdown voltage microelectronic device isolation structure with improved reliability Public/Granted day:2017-09-19
Information query
IPC分类: