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US20160202610A1 THINNER COMPOSITIONS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME 有权
薄膜组合物及使用其制造半导体器件的方法

THINNER COMPOSITIONS AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
Abstract:
A thinner composition including an acetate-based compound in an amount in a range of about 30 weight percent to about 70 weight percent, a lactate-based compound in an amount in a range of about 1 weight percent to about 20 weight percent, a propionate-based compound in an amount in a range of about 30 weight percent to about 60 weight percent, and an ether-based additive in an amount in a range of about 10 ppm to about 500 ppm, based on a total amount of the composition.
Abstract(Chinese):

一种较薄的组合物，其包含约30重量％至约70重量％范围内的量的乙酸酯基化合物，约1重量％至约20重量％范围内的量的乳酸盐基化合物，丙酸酯 基于化合物，其量为约30重量％至约60重量％，基于组合物总量的约10ppm至约500ppm范围内的醚类添加剂。

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