Invention Application
US20160202615A1 MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME 有权
无障碍曝光装置和使用其的无障碍曝光方法

  • Patent Title: MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME
  • Patent Title (中): 无障碍曝光装置和使用其的无障碍曝光方法
  • Application No.: US14836422
    Application Date: 2015-08-26
  • Publication No.: US20160202615A1
    Publication Date: 2016-07-14
  • Inventor: KAB-JONG SEOHi-Kuk LeeJae-Hyuk ChangKi-Beom Lee
  • Applicant: SAMSUNG DISPLAY CO., LTD.
  • Priority: KR10-2015-0005915 20150113
  • Main IPC: G03F7/20
  • IPC: G03F7/20
MASKLESS EXPOSURE DEVICE AND MASKLESS EXPOSURE METHOD USING THE SAME
Abstract:
A maskless exposure device includes a plurality of exposure heads, each exposure head including a digital micro-mirror device configured to scan an exposure beam to a substrate, the exposure heads being disposed in staggered first and second rows, a plurality of reflecting members disposed on side surfaces of the exposure heads and having reflecting surfaces parallel with each other, a light emitting part configured to light to the reflecting members, and a light receiving part configured to receive light via the reflecting members.
Public/Granted literature
Information query
Patent Agency Ranking
0/0