Invention Application
- Patent Title: VAPOR DEPOSITION APPARATUS, DEPOSITION METHOD, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME
- Patent Title (中): 蒸气沉积装置，沉积方法及使用其制造有机发光显示装置的方法
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Application No.: US15076488Application Date: 2016-03-21
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Publication No.: US20160203954A1Publication Date: 2016-07-14
- Inventor: Suk-Won Jung , Myung-Soo Huh , Choel-Min Jang
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Priority: KR2010-2013-0016977 20130218
- Main IPC: H01J37/32
- IPC: H01J37/32
Abstract:
Provided is a vapor deposition apparatus including: a plasma generator configured to change at least a portion of a first raw material gas into a radical form; a corresponding surface corresponding to the plasma generator; a reaction space between the plasma generator and the corresponding surface; and an insulating member separated from, and surrounding the plasma generator.
Public/Granted literature
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