Invention Application
US20160203968A1 PROBE DISPLACEMENT MEASURING APPARATUS, IONIZATION APPARATUS INCLUDING THE SAME, AND MASS SPECTROMETRY APPARATUS
审中-公开
探头位移测量装置，包括它们的离子装置和大量光谱装置
- Patent Title: PROBE DISPLACEMENT MEASURING APPARATUS, IONIZATION APPARATUS INCLUDING THE SAME, AND MASS SPECTROMETRY APPARATUS
- Patent Title (中): 探头位移测量装置，包括它们的离子装置和大量光谱装置
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Application No.: US14989710Application Date: 2016-01-06
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Publication No.: US20160203968A1Publication Date: 2016-07-14
- Inventor: Yoichi Otsuka , Masafumi Kyogaku
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2015-003580 20150109
- Main IPC: H01J49/06
- IPC: H01J49/06 ; H01J49/12 ; H01J49/04 ; G01B11/26
Abstract:
A probe displacement measuring apparatus includes a cantilever probe, a light irradiation unit configured to irradiate the probe with light, a light receiving element configured to receive reflected light obtained by reflecting light emitted by the light irradiation unit on a surface of the probe as a spot, and a displacement obtaining unit configured to obtain displacement of the probe in accordance with a position of the spot on the light receiving element. The light receiving element has first and second light receiving surfaces divided by a straight division line. An angle defined by a displacement direction of the spot on the light receiving element and the division line is 0° or more and 90° or less.
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