Invention Application
US20160204022A1 SEMICONDUCTOR DEVICE STRUCTURES WITH IMPROVED PLANARIZATION UNIFORMITY, AND RELATED METHODS
有权
具有改进的平面化均匀性的半导体器件结构及相关方法
- Patent Title: SEMICONDUCTOR DEVICE STRUCTURES WITH IMPROVED PLANARIZATION UNIFORMITY, AND RELATED METHODS
- Patent Title (中): 具有改进的平面化均匀性的半导体器件结构及相关方法
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Application No.: US15080060Application Date: 2016-03-24
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Publication No.: US20160204022A1Publication Date: 2016-07-14
- Inventor: Giulio Albini
- Applicant: Micron Technology, Inc.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L45/00 ; H01L27/24 ; H01L23/522 ; H01L23/528

Abstract:
Semiconductor devices and structures, such as phase change memory devices, include peripheral conductive pads coupled to peripheral conductive contacts in a peripheral region. An array region may include memory cells coupled to conductive lines. Methods of forming such semiconductor devices and structures include removing memory cell material from a peripheral region and, thereafter, selectively removing portions of the memory cell material from the array region to define individual memory cells in the array region. Additional methods include planarizing the structure using peripheral conductive pads and/or spacer material over the peripheral conductive pads as a planarization stop material. Yet further methods include partially defining memory cells in the array region, thereafter forming peripheral conductive contacts, and thereafter fully defining the memory cells.
Public/Granted literature
- US09728449B2 Semiconductor device structures with improved planarization uniformity, and related methods Public/Granted day:2017-08-08
Information query
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