Invention Application
- Patent Title: SOURCE MATERIAL FOR ELECTRONIC DEVICE APPLICATIONS
- Patent Title (中): 电子设备应用的材料
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Application No.: US14989097Application Date: 2016-01-06
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Publication No.: US20160204205A1Publication Date: 2016-07-14
- Inventor: John Mark Meldrim , Yushi Hu , Yongjun Jeff Hu , Everett Allen McTeer
- Applicant: Micron Technology, Inc.
- Main IPC: H01L29/167
- IPC: H01L29/167 ; H01L27/115 ; H01L29/792 ; H01L29/08 ; C30B29/38 ; H01L29/04 ; H01L29/45 ; C30B23/02 ; C30B25/02 ; H01L29/788 ; H01L29/66

Abstract:
Various embodiments include methods and apparatuses comprising methods for formation of and apparatuses including a source material for electronic devices. One such apparatus includes a vertical string of memory cells comprising a plurality of alternating levels of conductor and dielectric material, a semiconductor material extending through the plurality of alternating levels of conductor material and dielectric material, and a source material coupled to the semiconductor material. The source material includes a titanium nitride layer and a source polysilicon layer in direct contact with the titanium nitride layer. Other methods and apparatuses are disclosed.
Public/Granted literature
- US10344398B2 Source material for electronic device applications Public/Granted day:2019-07-09
Information query
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