Invention Application
US20160204761A1 ACOUSTIC RESONATOR AND METHOD OF MANUFACTURING THE SAME 有权
声学谐振器及其制造方法

ACOUSTIC RESONATOR AND METHOD OF MANUFACTURING THE SAME
Abstract:
There are provided an acoustic resonator and a method of manufacturing the same. The acoustic resonator includes a resonance part including a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator also includes a substrate disposed below the resonance part and including a via hole penetrating through the substrate and a connection conductor disposed in the via hole and connected to at least one of the first and second electrodes.
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