Invention Application
US20160207761A1 NEMS DEVICES WITH SERIES FERROELECTRIC NEGATIVE CAPACITOR 有权
带有系列电磁负极电容器的NEMS装置

NEMS DEVICES WITH SERIES FERROELECTRIC NEGATIVE CAPACITOR
Abstract:
An electrical circuit comprising at least two negative capacitance insulators connected in series, one of the two negative capacitance insulators is biased to generate a negative capacitance. One of the negative capacitance insulators may include an air-gap which is part of a nanoelectromechnical system (NEMS) device and the second negative capacitance insulator includes a ferroelectric material. Both of the negative capacitance insulators may be located between the channel and gate of a field effect transistor. The NEMS device may include a movable electrode, a dielectric and a fixed electrode and arranged so that the movable electrode is attached to at least two points and spaced apart from the dielectric and fixed electrode, and the ferroelectric capacitor is electrically connected to either of the electrodes.
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