Invention Application
- Patent Title: NEMS DEVICES WITH SERIES FERROELECTRIC NEGATIVE CAPACITOR
- Patent Title (中): 带有系列电磁负极电容器的NEMS装置
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Application No.: US14701502Application Date: 2015-04-30
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Publication No.: US20160207761A1Publication Date: 2016-07-21
- Inventor: Muhammad Ashraful Alam , Muhammad Masuduzzaman , Ankit Jain
- Applicant: Purdue Research Foundation
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H01L29/51 ; H01L49/02 ; H01L27/22 ; H01L29/78 ; H01L27/115

Abstract:
An electrical circuit comprising at least two negative capacitance insulators connected in series, one of the two negative capacitance insulators is biased to generate a negative capacitance. One of the negative capacitance insulators may include an air-gap which is part of a nanoelectromechnical system (NEMS) device and the second negative capacitance insulator includes a ferroelectric material. Both of the negative capacitance insulators may be located between the channel and gate of a field effect transistor. The NEMS device may include a movable electrode, a dielectric and a fixed electrode and arranged so that the movable electrode is attached to at least two points and spaced apart from the dielectric and fixed electrode, and the ferroelectric capacitor is electrically connected to either of the electrodes.
Public/Granted literature
- US09755041B2 NEMS devices with series ferroelectric negative capacitor Public/Granted day:2017-09-05
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