Invention Application
- Patent Title: SPATIALLY-RESOLVED MONITORING OF FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS
- Patent Title (中): 集成计算元素制造的空间分析监测
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Application No.: US14400210Application Date: 2013-12-24
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Publication No.: US20160209326A1Publication Date: 2016-07-21
- Inventor: David L. PERKINS , Robert Paul FREESE , Christopher Michael JONES , Richard Neal GARDNER
- Applicant: HALLIBURTON ENERGY SERVICES, INC.
- Applicant Address: US TX Houston
- Assignee: HALLIBURTON ENERGY SERVICES, INC.
- Current Assignee: HALLIBURTON ENERGY SERVICES, INC.
- Current Assignee Address: US TX Houston
- International Application: PCT/US2013/077688 WO 20131224
- Main IPC: G01N21/41
- IPC: G01N21/41 ; C23C14/22 ; G01B11/06

Abstract:
Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and multiple layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated based on the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design, where the ICEs' layers are moved along a direction of motion during the forming; measuring characteristics of probe-light that interacts with formed ICEs' layers such that the measured characteristics are spatially-resolved along a first direction orthogonal to the direction of motion; determining, based on the spatially-resolved characteristics, complex refractive indices and thicknesses of the formed ICE layers as a function of the ICEs' location along the first direction; adjusting the forming based on the determinations.
Information query