Invention Application
- Patent Title: ROTATED BOUNDARIES OF STOPS AND TARGETS
- Patent Title (中): 倾斜的边界和目标边界
-
Application No.: US15083946Application Date: 2016-03-29
-
Publication No.: US20160209327A1Publication Date: 2016-07-21
- Inventor: Tzahi Grunzweig , Alexander Svizher
- Applicant: KLA-Tencor Corporation
- Main IPC: G01N21/47
- IPC: G01N21/47 ; G06F17/50
Abstract:
A scatterometry metrology system, configured to measure diffraction signals from at least one target having respective at least one measurement direction, the scatterometry metrology system having at least one field stop having edges which are slanted with respect to the at least one measurement direction.
Public/Granted literature
- US10761022B2 Rotated boundaries of stops and targets Public/Granted day:2020-09-01
Information query
