Invention Application
US20160211292A1 METHOD FOR MANUFACTURING IMAGE PICKUP APPARATUS, AND IMAGE PICKUP APPARATUS 审中-公开
制造图像拾取装置的方法和图像拾取装置

METHOD FOR MANUFACTURING IMAGE PICKUP APPARATUS, AND IMAGE PICKUP APPARATUS
Abstract:
A method for manufacturing an image pickup apparatus in which a second semiconductor region of first conductive type which becomes a well contact region is disposed adjacent to a first semiconductor region via an element isolation region in a pixel which has a well contact region among a plurality of pixels. A first mask which has openings in a region which becomes a first semiconductor region, an element isolation region disposed between the region which becomes the first semiconductor region and a region which becomes a second semiconductor region, and a region which becomes the second semiconductor region is disposed, and the first semiconductor region is formed in the region which becomes the first semiconductor region by conducting ion implantation of second conductive type at an oblique angle to a normal line of a principal surface using the first mask.
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