Invention Application
US20160233309A1 SEMICONDUCTOR DEVICE, DISPLAY DEVICE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
有权
半导体器件,显示器件和用于制造半导体器件的方法
- Patent Title: SEMICONDUCTOR DEVICE, DISPLAY DEVICE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
- Patent Title (中): 半导体器件,显示器件和用于制造半导体器件的方法
-
Application No.: US15021776Application Date: 2014-08-12
-
Publication No.: US20160233309A1Publication Date: 2016-08-11
- Inventor: Tadayoshi MIYAMOTO , Kazuhide TOMIYASU
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Osaka
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Osaka
- Priority: JP2013-193221 20130918
- International Application: PCT/JP2014/071257 WO 20140812
- Main IPC: H01L29/45
- IPC: H01L29/45 ; H01L29/66 ; H01L27/12 ; H01L29/786

Abstract:
This semiconductor device includes a substrate and a thin film transistor supported on the substrate. The thin film transistor includes a gate electrode, a semiconductor layer, a gate-insulating layer provided between the gate electrode and the semiconductor layer, and a source electrode and a drain electrode respectively making contact with the semiconductor layer. The source electrode and the drain electrode respectively include a main layer containing aluminum or copper, a lower layer having a first layer containing refractory metal and positioned at a substrate side of the main layer, and an upper layer having a second layer containing refractory metal. The upper layer is provided so as to cover an upper surface of the main layer and at least the section of the side face of the main layer that overlaps the semiconductor layer.
Public/Granted literature
- US09755036B2 Semiconductor device, display device, and method for producing semiconductor device Public/Granted day:2017-09-05
Information query
IPC分类: