Invention Application
- Patent Title: Local Alignment Point Calibration Method in Die Inspection
- Patent Title (中): 模具检查中的局部对准点校准方法
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Application No.: US15049524Application Date: 2016-02-22
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Publication No.: US20160247660A1Publication Date: 2016-08-25
- Inventor: Wei Fang , Kevin Liu , Fei Wang , Jack Jau
- Applicant: Hermes Microvision Inc.
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/06
Abstract:
A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.
Public/Granted literature
- US09953803B2 Local alignment point calibration method in die inspection Public/Granted day:2018-04-24
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