公开(公告)号：US09953803B2

公开(公告)日：2018-04-24

申请号：US15049524

申请日：2016-02-22

Applicant: Hermes Microvision Inc.

Inventor： Wei Fang ,  Kevin Liu ,  Fei Wang ,  Jack Jau

IPC: H01J37/20 ,  H01J37/06

CPC classification number: H01J37/20 ,  H01J37/06 ,  H01J37/222 ,  H01J37/3045 ,  H01J2237/202 ,  H01J2237/2826 ,  H01L22/12

Abstract: A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.

公开(公告)号：US20160247660A1

公开(公告)日：2016-08-25

申请号：US15049524

申请日：2016-02-22

Applicant: Hermes Microvision Inc.

Inventor： Wei Fang ,  Kevin Liu ,  Fei Wang ,  Jack Jau

IPC: H01J37/20 ,  H01J37/06

CPC classification number: H01J37/20 ,  H01J37/06 ,  H01J37/222 ,  H01J37/3045 ,  H01J2237/202 ,  H01J2237/2826 ,  H01L22/12

Abstract: A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.

Abstract translation: 通过直接控制偏转器来实现校准从缺陷检查工具的阶段引起的感兴趣点的位置误差的校准方法。 感兴趣点的位置误差是从设计布局数据库获得的。