发明申请
- 专利标题: RF IMPEDANCE MATCHING NETWORK
- 专利标题(中): 射频阻抗匹配网络
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申请号: US15061068申请日: 2016-03-04
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公开(公告)号: US20160248396A1公开(公告)日: 2016-08-25
- 发明人: Anton Mavretic
- 申请人: Reno Technologies, Inc.
- 主分类号: H03H7/38
- IPC分类号: H03H7/38 ; H01L21/67
摘要:
An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.
公开/授权文献
- US09584090B2 RF impedance matching network 公开/授权日:2017-02-28
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