发明申请
US20160248396A1 RF IMPEDANCE MATCHING NETWORK 有权
射频阻抗匹配网络

  • 专利标题: RF IMPEDANCE MATCHING NETWORK
  • 专利标题(中): 射频阻抗匹配网络
  • 申请号: US15061068
    申请日: 2016-03-04
  • 公开(公告)号: US20160248396A1
    公开(公告)日: 2016-08-25
  • 发明人: Anton Mavretic
  • 申请人: Reno Technologies, Inc.
  • 主分类号: H03H7/38
  • IPC分类号: H03H7/38 H01L21/67
RF IMPEDANCE MATCHING NETWORK
摘要:
An RF impedance matching network includes a transformation circuit coupled to an RF input and configured to provide a transformed impedance that is less than a fixed source impedance; a first shunt circuit in parallel to the RF input, the first shunt circuit including a first shunt variable component providing a first variable capacitance or inductance; and a first virtual ground coupled to the first shunt variable component and a ground; and a second shunt circuit in parallel to the RF input and the second shunt circuit including a second shunt variable component providing a second variable capacitance or inductance; and a second virtual ground coupled to the second shunt variable component and the ground.
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