Invention Application
- Patent Title: GAS SENSOR
- Patent Title (中): 气体传感器
-
Application No.: US15079840Application Date: 2016-03-24
-
Publication No.: US20160282259A1Publication Date: 2016-09-29
- Inventor: Stefan Kolb , Alfons Dehe , Jochen Huber , Franz Jost , Horst Theuss , Wilhelm Wiedmeier , Juergen Woellenstein
- Applicant: Infineon Technologies AG , Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.
- Priority: DE202015002315.0 20150327
- Main IPC: G01N21/17
- IPC: G01N21/17
Abstract:
Shown is a gas sensor including a sensor element, a measurement chamber and an emitter element. The sensor element has a MEMS membrane which is arranged in a first substrate region. Furthermore, the measurement chamber is embodied to receive a measurement gas.
Public/Granted literature
- US10365208B2 Gas sensor Public/Granted day:2019-07-30
Information query
