Invention Application
- Patent Title: METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, AND THIN FILM TRANSISTOR THEREOF
- Patent Title (中): 制造薄膜晶体管的方法及其薄膜晶体管
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Application No.: US15176388Application Date: 2016-06-08
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Publication No.: US20160284809A1Publication Date: 2016-09-29
- Inventor: Zongze HE
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Priority: CN201210460335.2 20121115
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/49 ; G02F1/1368 ; H01L29/45 ; H01L27/12 ; G02F1/1343 ; H01L29/786 ; H01L21/02

Abstract:
The present disclosure relates to the field of liquid crystal display, and provides a method for manufacturing a TFT and the TFT thereof. The TFT includes: a base substrate; a gate electrode with a three-dimensional structure formed on the base substrate; a gate insulating layer for completely covering a top face and two side faces of the gate electrode; a semiconductor layer for completely covering a top face and two side faces of the gate insulating layer; a buffer layer for covering a top face and two side faces of the semiconductor layer at two ends of the semiconductor layer; and source and drain electrodes for completely covering a top face and two side faces of the buffer layer, wherein the semiconductor layer of the TFT is of a three-dimensional structure.
Public/Granted literature
- US09620606B2 Method for manufacturing thin film transistor, and thin film transistor thereof Public/Granted day:2017-04-11
Information query
IPC分类: