Invention Application
- Patent Title: METHOD OF MANUFACTURING LIGHT EMITTING ELEMENT
- Patent Title (中): 制造发光元件的方法
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Application No.: US15079052Application Date: 2016-03-24
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Publication No.: US20160284944A1Publication Date: 2016-09-29
- Inventor: Junya NARITA , Takuya OKADA
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan-shi
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan-shi
- Priority: JP2015-060500 20150324; JP2015-079935 20150409; JP2015-230186 20151126
- Main IPC: H01L33/48
- IPC: H01L33/48

Abstract:
A method of manufacturing a light emitting element includes providing a wafer having a substrate and a semiconductor layered body provided on an upper surface of the substrate, irradiating the substrate with laser light from a side of a lower surface opposite to the upper surface of the substrate to form modified regions in the substrate, and dividing the wafer into light emitting elements at the modified regions as a starting point. The semiconductor layered body includes a first p-type semiconductor layer made of a nitride semiconductor and provided on the upper surface of the substrate, an n-type semiconductor layer made of a nitride semiconductor and provided on the first p-type semiconductor layer, an active layer made of a nitride semiconductor and provided on the n-type semiconductor layer, and a second p-type semiconductor layer made of a nitride semiconductor and provided on the active layer.
Public/Granted literature
- US09873170B2 Method of manufacturing light emitting element Public/Granted day:2018-01-23
Information query
IPC分类: