Invention Application
US20160284944A1 METHOD OF MANUFACTURING LIGHT EMITTING ELEMENT 有权
制造发光元件的方法

  • Patent Title: METHOD OF MANUFACTURING LIGHT EMITTING ELEMENT
  • Patent Title (中): 制造发光元件的方法
  • Application No.: US15079052
    Application Date: 2016-03-24
  • Publication No.: US20160284944A1
    Publication Date: 2016-09-29
  • Inventor: Junya NARITATakuya OKADA
  • Applicant: NICHIA CORPORATION
  • Applicant Address: JP Anan-shi
  • Assignee: NICHIA CORPORATION
  • Current Assignee: NICHIA CORPORATION
  • Current Assignee Address: JP Anan-shi
  • Priority: JP2015-060500 20150324; JP2015-079935 20150409; JP2015-230186 20151126
  • Main IPC: H01L33/48
  • IPC: H01L33/48
METHOD OF MANUFACTURING LIGHT EMITTING ELEMENT
Abstract:
A method of manufacturing a light emitting element includes providing a wafer having a substrate and a semiconductor layered body provided on an upper surface of the substrate, irradiating the substrate with laser light from a side of a lower surface opposite to the upper surface of the substrate to form modified regions in the substrate, and dividing the wafer into light emitting elements at the modified regions as a starting point. The semiconductor layered body includes a first p-type semiconductor layer made of a nitride semiconductor and provided on the upper surface of the substrate, an n-type semiconductor layer made of a nitride semiconductor and provided on the first p-type semiconductor layer, an active layer made of a nitride semiconductor and provided on the n-type semiconductor layer, and a second p-type semiconductor layer made of a nitride semiconductor and provided on the active layer.
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