Invention Application
US20160293388A1 PNEUMATIC COUNTERBALANCE FOR ELECTRODE GAP CONTROL 审中-公开
用于电极缝隙控制的气动计数器

PNEUMATIC COUNTERBALANCE FOR ELECTRODE GAP CONTROL
Abstract:
A plasma processing system for performing a plasma processing application includes a plasma processing chamber, first and second electrodes residing in the plasma processing chamber, and a pneumatic counterbalance system operatively connected to the first electrode. The pneumatic counterbalance system is configured to support and maintain a position of the first electrode during a plasma processing application for gap control. A drive assembly separate from the pneumatic counterbalance system is configured to move the first electrode with respect to the second electrode in the plasma processing chamber for gap adjustment.
Information query
Patent Agency Ranking
0/0