Invention Application
- Patent Title: PNEUMATIC COUNTERBALANCE FOR ELECTRODE GAP CONTROL
- Patent Title (中): 用于电极缝隙控制的气动计数器
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Application No.: US15089011Application Date: 2016-04-01
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Publication No.: US20160293388A1Publication Date: 2016-10-06
- Inventor: Lee Chen , Colin Campbell , Merritt Funk
- Applicant: Tokyo Electron Limited
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing system for performing a plasma processing application includes a plasma processing chamber, first and second electrodes residing in the plasma processing chamber, and a pneumatic counterbalance system operatively connected to the first electrode. The pneumatic counterbalance system is configured to support and maintain a position of the first electrode during a plasma processing application for gap control. A drive assembly separate from the pneumatic counterbalance system is configured to move the first electrode with respect to the second electrode in the plasma processing chamber for gap adjustment.
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