Invention Application
- Patent Title: METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Patent Title (中): 检验和计量方法与装置
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Application No.: US15093523Application Date: 2016-04-07
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Publication No.: US20160299438A1Publication Date: 2016-10-13
- Inventor: Everhardus Cornelis MOS , Erik Mathijs Maria Crombag , Ajith Ganesan
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G06F3/0482

Abstract:
A method of displaying a plurality of graphical user interface elements, each graphical user interface element representing a step in a measurement design, setup and/or monitoring process and each graphical user interface element enabling access by the user to further steps in the measurement design, setup and/or monitoring process for the associated step of the graphical user interface element, and displaying an indicator associated with one or more of the plurality of graphical user elements, the indicator indicating that a step in the measurement design, setup and/or monitoring process is not completed and/or that a key performance indicator associated with a step in the measurement design, setup and/or monitoring process has passed a threshold.
Public/Granted literature
- US09971478B2 Method and apparatus for inspection and metrology Public/Granted day:2018-05-15
Information query
IPC分类: