公开(公告)号：US11372338B2

公开(公告)日：2022-06-28

申请号：US16979056

申请日：2019-02-13

申请人： ASML NETHERLANDS B.V.

发明人： Ivo Matteo Leonardus Weijden ,  Jeroen Van Dongen ,  Cornelis Johannes Henricus Lambregts ,  Theo Wilhelmus Maria Thijssen ,  Ruud Rudolphus Johannes Catharinus De Wit ,  Hans Marinus Struijs ,  Erik Mathijs Maria Crombag ,  Roy Werkman ,  Maria Helena Schut ,  Erwin Riemens ,  Menno Meeldijk

IPC分类号： G03F7/20 ,  G01N21/95 ,  G03F9/00 ,  H01L21/66

摘要： A method for determining a preferred control strategy relating to control of a manufacturing process for manufacturing an integrated circuit. The method includes: obtaining process data associated with a design of said integrated circuit; and obtaining a plurality of candidate control strategies configured to control the manufacturing process based on the process data, each candidate control strategy including an associated cost metric based on an associated requirement to implement the candidate control strategy. A quality metric related to an expected performance of the manufacturing process is determined for each candidate control strategies, and a preferred control strategy is selected based on the determined quality metrics and associated cost metrics for each candidate control strategy.

公开(公告)号：US09971478B2

公开(公告)日：2018-05-15

申请号：US15093523

申请日：2016-04-07

申请人： ASML NETHERLANDS B.V.

发明人： Everhardus Cornelis Mos ,  Erik Mathijs Maria Crombag ,  Ajith Ganesan

IPC分类号： G03B27/42 ,  G06F3/0482 ,  G03F7/20

CPC分类号： G06F3/0482 ,  G03F7/70508 ,  G03F7/70616

摘要： A method of displaying a plurality of graphical user interface elements, each graphical user interface element representing a step in a measurement design, setup and/or monitoring process and each graphical user interface element enabling access by the user to further steps in the measurement design, setup and/or monitoring process for the associated step of the graphical user interface element, and displaying an indicator associated with one or more of the plurality of graphical user elements, the indicator indicating that a step in the measurement design, setup and/or monitoring process is not completed and/or that a key performance indicator associated with a step in the measurement design, setup and/or monitoring process has passed a threshold.

公开(公告)号：US20160299438A1

公开(公告)日：2016-10-13

申请号：US15093523

申请日：2016-04-07

申请人： ASML NETHERLANDS B.V.

发明人： Everhardus Cornelis MOS ,  Erik Mathijs Maria Crombag ,  Ajith Ganesan

IPC分类号： G03F7/20 ,  G06F3/0482

CPC分类号： G06F3/0482 ,  G03F7/70508 ,  G03F7/70616

摘要： A method of displaying a plurality of graphical user interface elements, each graphical user interface element representing a step in a measurement design, setup and/or monitoring process and each graphical user interface element enabling access by the user to further steps in the measurement design, setup and/or monitoring process for the associated step of the graphical user interface element, and displaying an indicator associated with one or more of the plurality of graphical user elements, the indicator indicating that a step in the measurement design, setup and/or monitoring process is not completed and/or that a key performance indicator associated with a step in the measurement design, setup and/or monitoring process has passed a threshold.

摘要翻译： 一种显示多个图形用户界面元素的方法，每个图形用户界面元素表示测量设计，建立和/或监视过程中的步骤，以及使得用户能够访问测量设计中的进一步步骤的每个图形用户界面元素， 用于图形用户界面元素的相关步骤的设置和/或监视过程，以及显示与多个图形用户元素中的一个或多个相关联的指示符，该指示符指示测量设计，建立和/或监视中的步骤 过程未完成和/或与测量设计，设置和/或监视过程中的步骤相关联的关键绩效指标已经通过阈值。