Invention Application
US20160315024A1 MECHANICAL HANDLING SUPPORT FOR THIN CORES USING PHOTO-PATTERNABLE MATERIAL 审中-公开
机械处理支持使用光刻材料制造薄片

MECHANICAL HANDLING SUPPORT FOR THIN CORES USING PHOTO-PATTERNABLE MATERIAL
Abstract:
An integrated circuit package includes a core such as a thin glass core with through-core vias. A photo-patternable material is disposed directly on surfaces of the core and in the through-core vias and is selectively patterned to expose at least an exposed portion of the surface of the core and the through-core vias. A metal layer, such as copper, is disposed in the exposed portion of the core and in the through-core vias. A mechanical handler frame may be used to clamp together the various layers including the core and the photo-patternable material. The photo-patternable material that remains after patterning is permanent, and prevents the mechanical handler frame from directly contacting the core. Thus the photo-patternable material provides mechanical support to the core and protects the core from the mechanical handler.
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