Invention Application
US20160315024A1 MECHANICAL HANDLING SUPPORT FOR THIN CORES USING PHOTO-PATTERNABLE MATERIAL
审中-公开
机械处理支持使用光刻材料制造薄片
- Patent Title: MECHANICAL HANDLING SUPPORT FOR THIN CORES USING PHOTO-PATTERNABLE MATERIAL
- Patent Title (中): 机械处理支持使用光刻材料制造薄片
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Application No.: US14691946Application Date: 2015-04-21
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Publication No.: US20160315024A1Publication Date: 2016-10-27
- Inventor: Kwan-yu LAI , Ravindra Vaman SHENOY , Urmi RAY
- Applicant: QUALCOMM Incorporated
- Main IPC: H01L23/15
- IPC: H01L23/15 ; H01L21/48 ; H01L23/498

Abstract:
An integrated circuit package includes a core such as a thin glass core with through-core vias. A photo-patternable material is disposed directly on surfaces of the core and in the through-core vias and is selectively patterned to expose at least an exposed portion of the surface of the core and the through-core vias. A metal layer, such as copper, is disposed in the exposed portion of the core and in the through-core vias. A mechanical handler frame may be used to clamp together the various layers including the core and the photo-patternable material. The photo-patternable material that remains after patterning is permanent, and prevents the mechanical handler frame from directly contacting the core. Thus the photo-patternable material provides mechanical support to the core and protects the core from the mechanical handler.
Information query
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