Invention Application
US20160341791A1 Voltage Contrast Based Fault and Defect Inference in Logic Chips
审中-公开
逻辑芯片中基于电压对比的故障和缺陷推理
- Patent Title: Voltage Contrast Based Fault and Defect Inference in Logic Chips
- Patent Title (中): 逻辑芯片中基于电压对比的故障和缺陷推理
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Application No.: US15136680Application Date: 2016-04-22
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Publication No.: US20160341791A1Publication Date: 2016-11-24
- Inventor: Brian Duffy
- Applicant: KLA-Tencor Corporation
- Main IPC: G01R31/305
- IPC: G01R31/305
Abstract:
A voltage contrast imaging defect detection system includes a voltage contrast imaging tool and a controller coupled to the voltage contrast imaging tool. The controller is configured to generate one or more voltage contrast imaging metrics for one or more structures on a sample, determine one or more target areas on the sample based on the one or more voltage contrast imaging metrics, receive a voltage contrast imaging dataset for the one or more target areas on the sample from the voltage contrast imaging tool, and detect one or more defects based on the voltage contrast imaging dataset.
Public/Granted literature
- US10539612B2 Voltage contrast based fault and defect inference in logic chips Public/Granted day:2020-01-21
Information query
