Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
-
Application No.: US15233034Application Date: 2016-08-10
-
Publication No.: US20160351694A1Publication Date: 2016-12-01
- Inventor: Kazuya HANAOKA , Naoto KUSUMOTO
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2013-231209 20131107
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L29/45 ; H01L21/02 ; H01L27/12

Abstract:
A semiconductor device with a structure in which an increase in the number of oxygen vacancies in an oxide semiconductor layer can be suppressed and a method for manufacturing the semiconductor device are provided. The semiconductor device includes an oxide insulating layer; intermediate layers apart from each other over the oxide insulating layer; a source electrode layer and a drain electrode layer over the intermediate layers; an oxide semiconductor layer that is electrically connected to the source electrode layer and the drain electrode layer and is in contact with the oxide insulating layer; a gate insulating film over the source electrode layer, the drain electrode layer, and the oxide semiconductor layer; and a gate electrode layer that is over the gate insulating film and overlaps with the source electrode layer, the drain electrode layer, and the oxide semiconductor layer.
Public/Granted literature
- US09722055B2 Semiconductor device and manufacturing method thereof Public/Granted day:2017-08-01
Information query
IPC分类: