Invention Application
- Patent Title: Pattern-Measuring Device and Computer Program
- Patent Title (中): 图案测量装置和计算机程序
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Application No.: US15117964Application Date: 2015-01-07
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Publication No.: US20160356598A1Publication Date: 2016-12-08
- Inventor: Yasutaka TOYODA , Hiroyuki SINDO
- Applicant: Hitachi High-Technologies Corporation
- Priority: JP2014-031203 20140221
- International Application: PCT/JP2015/050195 WO 20150107
- Main IPC: G01B15/00
- IPC: G01B15/00 ; G01N23/225

Abstract:
In order to provide a pattern-measuring device and a computer program that quantitatively evaluate the effects brought about by the presence of pattern deformations in a circuit, this invention proposes a pattern-measuring device that measures first distances between first edges in pattern data being measured and second edges that correspond to said first edges in a benchmark pattern that corresponds to the pattern being measured. Said pattern-measuring device computes a score for the first edges or the pattern being measured on the basis of the first distances and second distances between the first edges and/or the second edges and third edges that are adjacent to but different from the first and second edges.
Public/Granted literature
- US10180317B2 Pattern-measuring device and computer program Public/Granted day:2019-01-15
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