Invention Application
US20160363553A1 MICROELECTROMECHANICAL GAS SENSOR BASED ON KNUDSEN THERMAL FORCE
审中-公开
基于KENDSEN热力的微电子气体传感器
- Patent Title: MICROELECTROMECHANICAL GAS SENSOR BASED ON KNUDSEN THERMAL FORCE
- Patent Title (中): 基于KENDSEN热力的微电子气体传感器
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Application No.: US15183259Application Date: 2016-06-15
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Publication No.: US20160363553A1Publication Date: 2016-12-15
- Inventor: Alina Alexeenko , Andrew Strongrich
- Applicant: Purdue Research Foundation
- Applicant Address: US IN West Lafayette
- Assignee: Purdue Research Foundation
- Current Assignee: Purdue Research Foundation
- Current Assignee Address: US IN West Lafayette
- Main IPC: G01N27/22
- IPC: G01N27/22
Abstract:
A microelectromechanical (MEMS) gas sensor operating based on Knudsen thermal force is disclosed. The sensor includes a substrate, at least one stationary assembly that is fixedly coupled to the substrate, and at least one moveable assembly that is positioned above the substrate which is biased to move substantially according to a main axis and juxtaposed with the at least one stationary assembly.
Public/Granted literature
- US10161818B2 Microelectromechanical gas sensor based on knudsen thermal force Public/Granted day:2018-12-25
Information query
