发明申请
- 专利标题: TEMPERATURE CONTROL METHOD AND PLASMA PROCESSING APPARATUS
- 专利标题(中): 温度控制方法和等离子体处理装置
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申请号: US15175229申请日: 2016-06-07
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公开(公告)号: US20160365229A1公开(公告)日: 2016-12-15
- 发明人: Keigo TOYODA , Hiroshi TSUJIMOTO
- 申请人: Tokyo Electron Limited
- 优先权: JP2015-118072 20150611
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A method for controlling the temperature of a mounting table in a plasma processing apparatus, includes: calculating a first heat input amount according to high frequency power applied in a given process, wherein the first heat input amount is calculated based on a data table, the data table being generated by measuring temperatures so as to find a first relationship between the high frequency power applied in the plasma processing apparatus and the heat input amount to the mounting table; controlling, based on an operation map, the temperature of at least one of the first heating mechanism and the cooling mechanism so that a first temperature difference between the cooling mechanism and the first heating mechanism is within a controllable range corresponding to the first heat input amount, wherein the temperature of the first heating mechanism is controllable upon the first temperature difference falling within the controllable.
公开/授权文献
- US10163607B2 Temperature control method and plasma processing apparatus 公开/授权日:2018-12-25
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