Invention Application
- Patent Title: SEMICONDUCTOR STRUCTURES INCLUDING LINERS COMPRISING ALUCONE AND RELATED METHODS
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Application No.: US15244629Application Date: 2016-08-23
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Publication No.: US20160365514A1Publication Date: 2016-12-15
- Inventor: Zhe Song , Tuman E. Allen , Cole S. Franklin , F. Daniel Gealy
- Applicant: Micron Technology, Inc.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/115 ; H01L27/24
Abstract:
A semiconductor device including stacked structures. The stacked structures include at least two chalcogenide materials or alternating dielectric materials and conductive materials. A liner including alucone is formed on sidewalls of the stacked structures. Methods of forming the semiconductor device are also disclosed.
Public/Granted literature
- US10573513B2 Semiconductor structures including liners comprising alucone and related methods Public/Granted day:2020-02-25
Information query
IPC分类:
