Invention Application
US20160370563A1 Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface
有权
具有单个非球面的普通光学元件曝光镜头组
- Patent Title: Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface
- Patent Title (中): 具有单个非球面的普通光学元件曝光镜头组
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Application No.: US14741550Application Date: 2015-06-17
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Publication No.: US20160370563A1Publication Date: 2016-12-22
- Inventor: Jiun-Woei Huang , Shih-Feng Tseng , Jer-Liang Andrew Yeh
- Applicant: National Applied Research Laboratories
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G02B27/00 ; G03F7/20 ; G02B13/18

Abstract:
A common optical components exposer lens set having a single non-spherical surface, comprising a common optical element set, comprising a first, second, and third lens arranged sequentially; a spherical reflecting mirror, arranged below the third spherical lens; and a planar reflecting lens, comprising a first and second planar reflecting, inclinedly arranged above the first lens, so that an equi-multiplication exposer lens set is formed by the spherical mirror set, so as to impinge a pattern on an object onto a photosensitive surface. As such, a single non-spherical surface and overlapping assembly, composed of three lenses having the single non-spherical surface and a spherical reflecting lens and two planar reflecting lenses overlapping together, in which two optical material types are arranged with respect to each other.
Public/Granted literature
- US09618734B2 Optical components exposer set having non-spherical component Public/Granted day:2017-04-11
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |