Invention Application
US20160370563A1 Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface 有权
具有单个非球面的普通光学元件曝光镜头组

Common Optical Elements Exposer Lens Set Having Single Non-Spherical Surface
Abstract:
A common optical components exposer lens set having a single non-spherical surface, comprising a common optical element set, comprising a first, second, and third lens arranged sequentially; a spherical reflecting mirror, arranged below the third spherical lens; and a planar reflecting lens, comprising a first and second planar reflecting, inclinedly arranged above the first lens, so that an equi-multiplication exposer lens set is formed by the spherical mirror set, so as to impinge a pattern on an object onto a photosensitive surface. As such, a single non-spherical surface and overlapping assembly, composed of three lenses having the single non-spherical surface and a spherical reflecting lens and two planar reflecting lenses overlapping together, in which two optical material types are arranged with respect to each other.
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