Invention Application
- Patent Title: FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
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Application No.: US15261616Application Date: 2016-09-09
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Publication No.: US20160377989A1Publication Date: 2016-12-29
- Inventor: Rogier Hendrikus Magdalena CORTIE , Michel Riepen , Cornelius Maria Rops
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary from a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; a plurality of gas supply openings in a linear array at least partly surrounding and radially outward of the meniscus pinning feature; and a gas recovery opening radially outward of the plurality of gas supply openings in a linear array.
Public/Granted literature
- US10133190B2 Fluid handling structure, a lithographic apparatus and a device manufacturing method Public/Granted day:2018-11-20
Information query
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