Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
- Patent Title (中): 半导体器件
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Application No.: US15170230Application Date: 2016-06-01
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Publication No.: US20160380075A1Publication Date: 2016-12-29
- Inventor: Jae-Yup CHUNG , Hyun-Jo KIM , Seong-Yul PARK , Se-Wan PARK , Jong-Mil YOUN , Jeong-Hyo LEE , Hwa-Sung RHEE , Hee-Don JEONG , Ji-Yong HA
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2015-0089534 20150624
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/08 ; H01L29/06 ; H01L29/16 ; H01L29/165 ; H01L29/78 ; H01L27/092 ; H01L29/161

Abstract:
A semiconductor device includes a fin-type pattern including a first short side and a second short side opposed to each other, a first trench in contact with the first short side, a second trench in contact with the second short side, a first field insulating film in the first trench, the first field insulating film including a first portion and a second portion arranged sequentially from the first short side, and a height of the first portion being different from a height of the second portion, a second field insulating film in the second trench, and a first dummy gate on the first portion of the first field insulating film.
Public/Granted literature
- US10032886B2 Semiconductor device Public/Granted day:2018-07-24
Information query
IPC分类: