Invention Application
US20170001857A1 SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME 审中-公开
传感器元件及其制造方法

SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME
Abstract:
Provided are sensor elements and a method of manufacturing the same. The sensor element includes a die, an active part including a frame surrounded by the die, a first trench disposed between the die and the active part, and a bridge connecting the die and the frame and a second trench being formed in the bridge, whereby electrical connection from the active part to an electrode pad may be secured and transfer of external stress to the active part may be significantly reduced through the second trench.
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