Invention Application
- Patent Title: SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Patent Title (中): 传感器元件及其制造方法
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Application No.: US15059803Application Date: 2016-03-03
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Publication No.: US20170001857A1Publication Date: 2017-01-05
- Inventor: Dae Hun JEONG , Chang Hyun LIM , Tae Hun LEE
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2015-0094036 20150701
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81C1/00

Abstract:
Provided are sensor elements and a method of manufacturing the same. The sensor element includes a die, an active part including a frame surrounded by the die, a first trench disposed between the die and the active part, and a bridge connecting the die and the frame and a second trench being formed in the bridge, whereby electrical connection from the active part to an electrode pad may be secured and transfer of external stress to the active part may be significantly reduced through the second trench.
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