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公开(公告)号:US20210036683A1
公开(公告)日:2021-02-04
申请号:US16898835
申请日:2020-06-11
发明人: Won HAN , Sung Wook KIM , Dae Hun JEONG , Sang Uk SON , Sang Heon HAN , Jeong Hoon RYOU
摘要: A bulk-acoustic wave resonator includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer at least partially covering the lower electrode; and an upper electrode at least partially covering the piezoelectric layer. On a surface of the bulk-acoustic wave resonator, a centroid of an active area in which the lower electrode, the piezoelectric layer, and the upper electrode all overlap each other is aligned with a center of a rectangle defining an aspect ratio of the active area. The active area has a shape of a polygon symmetrical with respect to at least one axis passing through the center of the rectangle defining the aspect ratio. The aspect ratio is greater than or equal to 2 and less than or equal to 10.
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公开(公告)号:US20170003187A1
公开(公告)日:2017-01-05
申请号:US15045684
申请日:2016-02-17
发明人: Chang Hyun LIM , Dae Hun JEONG , Tae Hun LEE
IPC分类号: G01L9/00
CPC分类号: G01L9/0054 , G01L9/0047
摘要: A pressure sensor element includes a die; a concave groove formed in one surface of the die; a partition wall formed in the concave groove to be spaced apart from side walls, the partition wall partitioning the concave groove into a trench and a cavity; and a membrane formed on the die and covering the concave groove.
摘要翻译: 压力传感器元件包括模具; 形成在模具的一个表面中的凹槽; 形成在所述凹槽中与侧壁间隔开的分隔壁,所述分隔壁将所述凹槽分隔成沟槽和空腔; 以及形成在模具上并覆盖凹槽的膜。
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公开(公告)号:US20160273985A1
公开(公告)日:2016-09-22
申请号:US14933043
申请日:2015-11-05
发明人: Tae Hun LEE , Chang Hyun LIM , June Kyoo LEE , Dae Hun JEONG
IPC分类号: G01L9/00
CPC分类号: G01L9/0054 , G01L19/0618
摘要: A pressure sensor includes a sensor, an elastic support portion, a membrane, and a pressure detector. The sensor is accommodated in a frame of a base substrate. The elastic support portion is elastically connecting the sensor to the frame. The membrane is disposed on a surface of the sensor. The pressure detector is disposed on the membrane and configured to detect a variation in pressure based on a movement of the membrane.
摘要翻译: 压力传感器包括传感器,弹性支撑部分,膜和压力检测器。 传感器容纳在基底的框架中。 弹性支撑部分将传感器弹性地连接到框架。 膜设置在传感器的表面上。 压力检测器设置在膜上并且被配置为基于膜的移动来检测压力变化。
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公开(公告)号:US20220140811A1
公开(公告)日:2022-05-05
申请号:US17220119
申请日:2021-04-01
发明人: Tae Kyung LEE , Dae Hun JEONG , Ran Hee SHIN , Jin Suk SON , Hwa Sun LEE , Jae Goon AUM
摘要: A bulk acoustic wave resonator is provided. The resonator includes a substrate; a resonant portion including a first electrode, a piezoelectric layer, and a second electrode sequentially stacked on the substrate; and a temperature compensation layer disposed at least one of above and below the piezoelectric layer, wherein a material of the temperature compensation layer has a coefficient of thermal expansion of which a sign is opposite to a sign of a coefficient of thermal expansion of a material of the piezoelectric layer, and wherein a relation of a thickness of the temperature compensation layer and a thickness of the piezoelectric layer satisfies the following equation: 0.25
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公开(公告)号:US20220123714A1
公开(公告)日:2022-04-21
申请号:US17232828
申请日:2021-04-16
发明人: Dae Hun JEONG , Jeong Hoon RYOU , Jong Woon KIM
摘要: A bulk acoustic wave resonator includes: a substrate; a resonant portion including a sequentially stacked first electrode, piezoelectric layer, and second electrode; a cavity defined between the substrate and the resonant portion; and a heat dissipation portion disposed in the cavity and supporting the resonant portion. The second electrode includes a first region and a second region having a thickness greater than a thickness of the first region, and the second region is disposed above the heat dissipation portion.
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公开(公告)号:US20170244021A1
公开(公告)日:2017-08-24
申请号:US15271483
申请日:2016-09-21
发明人: Won HAN , Dae Hun JEONG , Jae Chang LEE , Tae Yoon KIM , Moon Chul LEE
IPC分类号: H01L41/047 , H01L41/29
CPC分类号: H01L41/0475 , H01L41/047 , H01L41/29 , H03H3/02 , H03H9/02118 , H03H9/173 , H03H2003/021
摘要: An acoustic resonator includes a resonating part including a piezoelectric layer located on a first electrode and a second electrode located on the piezoelectric layer; and a frame located on the second electrode along an edge of the resonating part, wherein the frame includes an inner surface and an outer surface, and the inner surface includes two inclined surfaces.
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公开(公告)号:US20160313201A1
公开(公告)日:2016-10-27
申请号:US14990317
申请日:2016-01-07
发明人: Tae Hun LEE , Chang Hyun LIM , Dae Hun JEONG
IPC分类号: G01L9/02
CPC分类号: G01L19/147
摘要: A pressure sensor package includes a substrate, a pressure sensor, and a semiconductor circuit. The semiconductor circuit is disposed on one surface of the substrate and having a reception space open to one surface of the substrate. A pressure sensor is connected to the substrate and disposed in the reception space.
摘要翻译: 压力传感器封装包括衬底,压力传感器和半导体电路。 半导体电路设置在基板的一个表面上,并且具有向基板的一个表面开放的接收空间。 压力传感器连接到基板并设置在接收空间中。
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公开(公告)号:US20210320644A1
公开(公告)日:2021-10-14
申请号:US17074978
申请日:2020-10-20
发明人: Jeong Hoon RYOU , Sang Uk SON , Sung Wook KIM , Won HAN , Dae Hun JEONG , Sang Heon HAN
摘要: A bulk-acoustic wave resonator includes: a first electrode; a piezoelectric layer at least partially disposed on an upper portion of the first electrode; and a second electrode disposed to cover at least a portion of the piezoelectric layer. The second electrode includes a frame disposed at an edge of an active region of the bulk-acoustic wave resonator, and the first electrode, the piezoelectric layer and the second electrode are disposed to overlap one another at the edge of the active region. The frame includes a wall disposed at the edge of the active region and a trench formed on an internal side of the wall. An internal boundary line of the trench has a concave-convex shape in a plane parallel to an upper surface of the frame.
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公开(公告)号:US20210313954A1
公开(公告)日:2021-10-07
申请号:US16936807
申请日:2020-07-23
发明人: Seung Wook PARK , Jae Hyun JUNG , Jae Chang LEE , Dae Hun JEONG , Sang Uk SON , Seong Hun NA
摘要: A bulk-acoustic wave resonator includes: a substrate; a first electrode disposed on the substrate; a piezoelectric layer disposed to cover at least a portion of the first electrode; a second electrode disposed to cover at least a portion of the piezoelectric layer; a metal pad connected to the first electrode and the second electrode; and a connection member connected an upper surface of the metal pad. A lower end portion of the connection member includes a tapered portion decreasing in a diameter in a direction toward a lower end of the connection member, and an angle between an inclined surface of the tapered portion and the upper surface of the metal pad is 45° to 80°.
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公开(公告)号:US20200186125A1
公开(公告)日:2020-06-11
申请号:US16411273
申请日:2019-05-14
发明人: Tae Kyung LEE , Yoon Sok PARK , Dae Hun JEONG
摘要: A bulk-acoustic wave resonator includes: a first substrate formed of a first material; an insulating layer or a piezoelectric layer disposed on a first side of the first substrate; and a second substrate formed of a second material and disposed on a second side of the first substrate, wherein the second material has thermal conductivity that is higher than a thermal conductivity of the first material.
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