Invention Application
- Patent Title: MEMS SENSOR DEVICES HAVING A SELF-TEST MODE
- Patent Title (中): 具有自检模式的MEMS传感器器件
-
Application No.: US14962328Application Date: 2015-12-08
-
Publication No.: US20170003315A1Publication Date: 2017-01-05
- Inventor: JEROME ROMAIN ENJALBERT , MARGARET LESLIE KNIFFIN , ANDREW C. MCNEIL
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Priority: IBPCT/IB2015/001341 20150630
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125

Abstract:
A micro-electro-mechanical system (MEMS) device comprises a micro-electro-mechanical system (MEMS) sensor; a detector circuit; a controller circuit coupled with the MEMS sensor; a first connection arranged between a first output of the MEMS sensor and a first input of the detector circuit; a second connection arranged between a second output of the MEMS sensor and a second input of the detector circuit; and a first switch arranged in the first connection. The controller circuit is configured to open the first switch during a first test mode so as to connect only a single input of the detector circuit with an output of the MEMS sensor. A further switch may be provided to connect two outputs of the MEMS sensor to a single input of the detector circuit.
Information query