Invention Application
- Patent Title: REFLOW APPARATUS
- Patent Title (中): 反光装置
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Application No.: US15080566Application Date: 2016-03-24
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Publication No.: US20170005063A1Publication Date: 2017-01-05
- Inventor: Tae-gyu KANG , Kun-ho SONG , Jung-hun SUNG , Ju-young YU
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2015-0094936 20150702
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B23K3/08 ; B23K1/00

Abstract:
A reflow apparatus include a carrier supporting a printed circuit board placed on a side thereof by using a vacuum pressure generated therein, and a processing chamber including a heating chamber and a cooling chamber, wherein the carrier includes at least one adsorption hole, formed in one side of the carrier, a vacuum space connected to the adsorption hole, and a vacuum control unit capable of maintaining or removing a vacuum pressure in the vacuum space by selective opening and closing a path connecting the vacuum space to the outside.
Information query
IPC分类: