Invention Application
- Patent Title: WAFER ELECTROPLATING CHUCK ASSEMBLY
- Patent Title (中): WAFER电镀钳组件
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Application No.: US15198945Application Date: 2016-06-30
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Publication No.: US20170009367A1Publication Date: 2017-01-12
- Inventor: Randy A. Harris , Michael Windham
- Applicant: APPLIED Materials, Inc.
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D17/06 ; H01L21/687

Abstract:
A wafer is placed into a chuck assembly within an electroplating system. The chuck assembly includes a backing plate assembly engageable with a ring. A hub may be provided on one side of the backing plate assembly for attaching the chuck assembly to a rotor of a processor for electroplating a wafer. A wafer plate may be provided on the other side of the backing plate assembly. The ring has contact fingers electrically connected to a ring bus bar, and with the ring bus bar electrically connected to a power source in the processor via the backing plate assembly when the ring is engaged to the backing plate assembly. A wafer seal on the ring overlies the contact fingers. A chuck seal may be provided around a perimeter. Maintenance of the electrical contacts and the seal is performed remotely from the processors.
Public/Granted literature
- US10174437B2 Wafer electroplating chuck assembly Public/Granted day:2019-01-08
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