发明申请
- 专利标题: PRESSURE SENSING DEVICE
- 专利标题(中): 压力传感装置
-
申请号: US15011456申请日: 2016-01-29
-
公开(公告)号: US20170010166A1公开(公告)日: 2017-01-12
- 发明人: Jinyu Zhang , Rui Zhang
- 申请人: Jinyu Zhang , Rui Zhang
- 申请人地址: SG Singapore city
- 专利权人: AAC Technologies Pte. Ltd.
- 当前专利权人: AAC Technologies Pte. Ltd.
- 当前专利权人地址: SG Singapore city
- 优先权: CN201510400008.1 20150709
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G06F3/041
摘要:
A pressure sensing device is disclosed in the present disclosure. The pressure sensing device includes a bottom plate, a flexible shell and a MEMS pressure sensor. The flexible shell covers the bottom plate for forming a hermetical cavity, and the MEMS pressure sensor is accommodated in the hermetical cavity. Air in the hermetical cavity is compressed when the flexible shell is pressed, the MEMS pressure sensor is configured for detecting variation of an air pressure within the hermetical cavity when the flexible shell is pressed, and convert the variation of the air pressure into an electric signal.
公开/授权文献
- US09927313B2 Pressure sensing device 公开/授权日:2018-03-27
信息查询