发明申请
US20170016116A1 GRAPHENE PRODUCTION METHOD, GRAPHENE PRODUCTION APPARATUS AND GRAPHENE PRODUCTION SYSTEM
审中-公开
石墨生产方法，石墨生产设备和石墨生产系统
- 专利标题： GRAPHENE PRODUCTION METHOD, GRAPHENE PRODUCTION APPARATUS AND GRAPHENE PRODUCTION SYSTEM
- 专利标题（中）： 石墨生产方法，石墨生产设备和石墨生产系统
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申请号： US15202869申请日： 2016-07-06
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公开(公告)号： US20170016116A1公开(公告)日： 2017-01-19
- 发明人: Daisuke NISHIDE , Takashi MATSUMOTO , Ryota IFUKU
- 申请人： TOKYO ELECTRON LIMITED
- 优先权： JP2015-142460 20150716
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C01B31/04
摘要：
There is provided a graphene production method including: forming a catalyst metal film on a surface of a substrate; heating the catalyst metal film; and cooling the heated catalyst metal film, wherein the forming a catalyst metal film includes introducing carbons into the catalyst metal film.