Invention Application
- Patent Title: SYSTEMS AND METHODS FOR INSPECTING AN OBJECT
- Patent Title (中): 用于检查对象的系统和方法
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Application No.: US14800625Application Date: 2015-07-15
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Publication No.: US20170016834A1Publication Date: 2017-01-19
- Inventor: Haim Feldman , Ido Dolev , Ido Almog
- Applicant: Applied Materials Israel, Ltd.
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G02B26/12

Abstract:
A system, including an illumination module that comprises (a) a first traveling lens acousto-optic device; (b) a light source for illuminating the first traveling lens to provide an input beam that propagates along a first direction; (c) illumination optics for outputting an output beam that scans the object at a second direction; a detection unit; and a collection module for collecting a collected beam from the object, wherein the collected beam propagates along a third direction; and optically manipulating the collected beam to provide a counter-scan beam is directed towards the detection unit and has a focal point that is positioned at a same location regardless of the propagation of the collected beam along the third direction.
Public/Granted literature
- US09535014B1 Systems and methods for inspecting an object Public/Granted day:2017-01-03
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