Invention Application
- Patent Title: HYBRID METROLOGY TECHNIQUE
- Patent Title (中): 混合计量技术
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Application No.: US15120692Application Date: 2014-10-30
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Publication No.: US20170018069A1Publication Date: 2017-01-19
- Inventor: Alok Vaid , Cornel Bozdong , Shay Wolfling , Matthew J. Sendelbach , Jamie Tsai , Cermen Osorio
- Applicant: Globalfoundries Inc. , Nova Measuring Instruments Ltd.
- International Application: PCT/IL2014/050940 WO 20141030
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01B15/02 ; H01J37/28 ; G01B11/06

Abstract:
A computerized system and method are provided for use in measuring at least one parameter of interest of a structure. The system comprises a server utility configured for data communication with at least first and second data provider utilities. The server utility receives, from the server provider utilities, measured data comprising first and second measured data pieces of different types indicative of parameters of the same structure; and is capable of processing the first and second measured data pieces for optimizing one or more first parameters values of the structure in one of the first and second measured data pieces by utilizing one or more second parameters values of the structure of the other of said first and second measured data pieces.
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