发明申请
US20170018499A1 NECKED INTERCONNECT FUSE STRUCTURE FOR INTEGRATED CIRCUITS 审中-公开
集成电路的联合互连保险丝结构

NECKED INTERCONNECT FUSE STRUCTURE FOR INTEGRATED CIRCUITS
摘要:
Interconnect fuse structures including a fuse with a necked line segment, as well as methods of fabricating such structures. A current driven by an applied fuse programming voltage may open necked fuse segments to affect operation of an IC. In embodiments, the fuse structure includes a pair of neighboring interconnect lines equidistant from a center interconnect line. In further embodiments, the center interconnect line, and at least one of the neighboring interconnect lines, include line segments of lateral widths that differ by a same, and complementary amount. In further embodiments, the center interconnect line is interconnected at opposite ends of a necked line segment. In further embodiments, the necked line segment is fabricated with pitch-reducing spacer-based patterning process.
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