发明申请
- 专利标题: NECKED INTERCONNECT FUSE STRUCTURE FOR INTEGRATED CIRCUITS
- 专利标题(中): 集成电路的联合互连保险丝结构
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申请号: US15124867申请日: 2014-05-08
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公开(公告)号: US20170018499A1公开(公告)日: 2017-01-19
- 发明人: Zhanping Chen , Andrew W. Yeoh , Seongtae Jeong , Uddalak Bhattacharya , Charles H. Wallace
- 申请人: Zhanping Chen , Andrew W. Yeoh , Seongtae Jeong , Uddalak Bhattacharya , Charles H. Wallace
- 国际申请: PCT/US2014/037266 WO 20140508
- 主分类号: H01L23/525
- IPC分类号: H01L23/525 ; H01L23/528 ; H01L21/768
摘要:
Interconnect fuse structures including a fuse with a necked line segment, as well as methods of fabricating such structures. A current driven by an applied fuse programming voltage may open necked fuse segments to affect operation of an IC. In embodiments, the fuse structure includes a pair of neighboring interconnect lines equidistant from a center interconnect line. In further embodiments, the center interconnect line, and at least one of the neighboring interconnect lines, include line segments of lateral widths that differ by a same, and complementary amount. In further embodiments, the center interconnect line is interconnected at opposite ends of a necked line segment. In further embodiments, the necked line segment is fabricated with pitch-reducing spacer-based patterning process.
公开/授权文献
- US09679845B2 Necked interconnect fuse structure for integrated circuits 公开/授权日:2017-06-13